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App. No. 09/950,748 · Confirmation No. 2342

PROCESSING APPARATUS HAVING PARTICLE COUNTER AND CLEANING DEVICE, CLEANING METHOD, CLEANLINESS DIAGNOSIS METHOD AND SEMICONDUCTOR FABRICATING APPARATUS USING THE SAME

Inventor: Kenji Matsuoka
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-02-17 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-02-17 1449 List of References cited by applicant and considered by examiner 1 View
2004-02-17 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-01-14 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-01-14 LET. Miscellaneous Incoming Letter 3 View
2004-01-14 DRW Drawings-only black and white line drawings 1 View
2003-12-30 RUSH Printer Query form, used by the publications branch 2 View
2003-11-04 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-11-04 FOR Foreign Reference 18 View
2003-11-04 FOR Foreign Reference 6 View
2003-11-04 FOR Foreign Reference 8 View
2003-11-04 FOR Foreign Reference 8 View
2003-11-04 FOR Foreign Reference 6 View
2003-10-15 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-15 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-10-15 CLM Claims 4 View
2003-10-15 DRW Drawings-only black and white line drawings 1 View
2003-10-15 FWCLM Index of Claims 1 View
2003-10-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-15 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-25 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-09-25 FOR Foreign Reference 8 View
2003-09-25 FOR Foreign Reference 8 View
2003-09-25 FOR Foreign Reference 6 View
2003-09-25 FOR Foreign Reference 6 View
2003-09-25 FOR Foreign Reference 20 View
2003-08-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-08-20 CLM Claims 4 View
2003-08-20 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-08-20 DRW Drawings-only black and white line drawings 3 View
2003-05-20 CTNF Non-Final Rejection 9 View
2003-05-20 892 List of references cited by examiner 1 View
2003-05-20 FOR Foreign Reference 7 View
2003-05-20 1449 List of References cited by applicant and considered by examiner 1 View
2003-05-15 SRNT Examiner's search strategy and results 5 View
2003-05-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-04-07 CTRS Requirement for Restriction/Election 5 View
2001-09-12 TRNA Transmittal of New Application 2 View
2001-09-12 SPEC Specification 21 View
2001-09-12 CLM Claims 4 View
2001-09-12 ABST Abstract 1 View
2001-09-12 DRW Drawings-only black and white line drawings 8 View
2001-09-12 OATH Oath or Declaration filed 2 View
2001-09-12 LET. Miscellaneous Incoming Letter 1 View
2001-09-12 TRNA Transmittal of New Application 2 View
2001-09-12 SPEC Specification 21 View
2001-09-12 CLM Claims 4 View
2001-09-12 ABST Abstract 1 View
2001-09-12 DRW Drawings-only black and white line drawings 8 View
2001-09-12 OATH Oath or Declaration filed 2 View
2001-09-12 FRPR Certified Copy of Foreign Priority Application 18 View
2001-09-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-09-12 FOR Foreign Reference 8 View
2001-09-12 WCLM Claims Worksheet (PTO-2022) 1 View
2001-09-12 WFEE Fee Worksheet (SB06) 1 View
2001-09-12 WFEE Fee Worksheet (SB06) 1 View
2001-09-12 FWCLM Index of Claims 1 View
2001-09-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-09-12 SRFW Search information including classification, databases and other search related notes 1 View
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Quick Facts
App. No.
09/950,748
Filed
2001-09-12
Granted
2004-06-29
Pub. No.
US20020029791A1
Art Unit
1763
PTA
-120 days