Patent Assignment
Reel/Frame 012183/0465
Assignment of Assignor's Interest
Recorded: 2001-09-12
Pages: 3
Assignor
MATSUOKA, KENJI
Executed: 2001-09-05
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU TOKYO, JAPAN
Covered Property
(1)
Processing Apparatus Having Particle Counter and Cleaning Device, Cleaning Method, Cleanliness Diagnosis Method and Semiconductor Fabricating Apparatus Using the Same
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.