Granted Patent
Utility
US 6,562,185
· Confirmation No. 9817
WAFER BASED TEMPERATURE SENSORS FOR CHARACTERIZING CHEMICAL MECHANICAL POLISHING PROCESSES
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-09-18 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-09-18 | SPEC |
Specification | 26 | View | |
| 2001-09-18 | CLM |
Claims | 6 | View | |
| 2001-09-18 | ABST |
Abstract | 1 | View | |
| 2001-09-18 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2001-09-18 | OATH |
Oath or Declaration filed | 3 | View | |
| 2001-09-18 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Steven C. Avanzino
Cupertino, CA
Bhanwar Singh
Morgan Hill, CA
Bharath Rangarajan
Santa Clara, CA
Ramkumar Subramanian
Sunnyval, CA
Classification
USPC
156/345.13
Prosecution
- Examiner
- MACARTHUR, SYLVIA
- Art Unit
- 1763
- Docket No.
- G0211
- Confirmation No.
- 9817
Publication
- Pub. No.
- US20030055526A1
- Pub. Date
- 2003-03-20
Patent Term Adjustment
0days
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
RELEASE OF SECURITY INTEREST
Recorded 2020-11-20
from
GLOBALFOUNDRIES INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-11-02
from
GLOBALFOUNDRIES INC.
SECURITY AGREEMENT
Recorded 2018-11-29
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-09-18
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,562,185
- App. No.
- 09/955,552
- Filed
- 2001-09-18
- Granted
- 2003-05-13
- Pub. No.
- US20030055526A1
- Examiner
- MACARTHUR, SYLVIA
- Art Unit
- 1763
- PTA
- 0 days
External Links