IP Library › Granted Patent US 6,798,065
Granted Patent Utility
US 6,798,065 · Confirmation No. 1411

METHOD AND APPARATUS FOR HIGH-RESOLUTION IN-SITU PLASMA ETCHING OF INORGANIC AND METAL FILMS

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2016-05-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2016-05-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2016-05-05 MFEE.C.AD Maintenance Fee Address Change 1 View
2016-05-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-05-05 C.AD Change of Address 1 View
2016-05-05 PA.. Power of Attorney 1 View
2008-03-27 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-06-07 IFEE Issue Fee Payment (PTO-85B) 3 View
2004-05-17 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-17 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-17 892 List of references cited by examiner 1 View
2004-05-17 FWCLM Index of Claims 1 View
2004-05-17 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-17 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-07 SRNT Examiner's search strategy and results 1 View
2004-03-09 WFEE Fee Worksheet (SB06) 1 View
2004-03-09 FWCLM Index of Claims 1 View
2004-02-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-02-02 CLM Claims 4 View
2004-02-02 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-09-02 CTNF Non-Final Rejection 8 View
2003-09-02 892 List of references cited by examiner 1 View
2003-08-24 SRNT Examiner's search strategy and results 1 View
2003-07-28 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2003-07-28 CLM Claims 2 View
2003-07-28 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2003-07-28 RCEX Request for Continued Examination (RCE) 1 View
2003-06-03 CTAV Advisory Action (PTOL-303) 3 View
2003-05-22 SRNT Examiner's search strategy and results 1 View
2003-05-12 A.NE Response After Final Action 3 View
2003-05-12 CLM Claims 2 View
2003-05-12 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2003-02-28 CTFR Final Rejection 9 View
2003-02-28 892 List of references cited by examiner 1 View
2003-02-13 SRNT Examiner's search strategy and results 1 View
2002-12-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-12-12 CLM Claims 2 View
2002-12-12 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2002-09-27 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2002-09-26 CTNF Non-Final Rejection 7 View
2002-09-26 892 List of references cited by examiner 1 View
2002-09-26 1449 List of References cited by applicant and considered by examiner 1 View
2002-07-05 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2002-05-17 PA.. Power of Attorney 2 View
2001-09-19 TRNA Transmittal of New Application 3 View
2001-09-19 SPEC Specification 17 View
2001-09-19 CLM Claims 3 View
2001-09-19 ABST Abstract 1 View
2001-09-19 DRW Drawings-only black and white line drawings 7 View
2001-09-19 OATH Oath or Declaration filed 7 View
2001-09-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-09-19 SRFW Search information including classification, databases and other search related notes 1 View
2001-09-19 FWCLM Index of Claims 1 View
2001-09-19 TRNA Transmittal of New Application 3 View
2001-09-19 DRW Drawings-only black and white line drawings 7 View
2001-09-19 SPEC Specification 17 View
2001-09-19 CLM Claims 3 View
2001-09-19 ABST Abstract 1 View
2001-09-19 OATH Oath or Declaration filed 7 View
2001-09-19 WFEE Fee Worksheet (SB06) 1 View
2001-09-19 WFEE Fee Worksheet (SB06) 4 View
2001-09-19 WCLM Claims Worksheet (PTO-2022) 1 View
2001-09-19 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
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Quick Facts
Patent No.
US 6,798,065
App. No.
09/955,677
Filed
2001-09-19
Granted
2004-09-28
Pub. No.
US20020016071A1
Art Unit
2822
PTA
-123 days