Granted Patent
Utility
US 6,566,219
· Confirmation No. 4784
METHOD OF FORMING A SELF ALIGNED TRENCH IN A SEMICONDUCTOR USING A PATTERNED SACRIFICIAL LAYER FOR DEFINING THE TRENCH OPENING
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-01-29 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-01-29 | DRW |
Drawings-only black and white line drawings | 23 | View | |
| 2001-09-21 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-09-21 | SPEC |
Specification | 14 | View | |
| 2001-09-21 | CLM |
Claims | 3 | View | |
| 2001-09-21 | ABST |
Abstract | 1 | View | |
| 2001-09-21 | DRW |
Drawings-only black and white line drawings | 18 | View | |
| 2001-09-21 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Gerhard Kunkel
Radebeul, GERMANY
Shahid Butt
Ossining, NY
Ramachandra Divakaruni
Ossining, NY
Armin M. Reith
Muenchen, GERMANY
Munir D. Naeem
Poughkeepsie, NY
Attorneys & Agents of Record
Classification
USPC
438/386
H10B12/0383
H10B12/0387
H10B12/488
Prosecution
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- Docket No.
- 00P7912 US 01
- Confirmation No.
- 4784
Publication
- Pub. No.
- US20020068400A1
- Pub. Date
- 2002-06-06
Patent Term Adjustment
-46days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-14
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-14
from
REITH, ARMIN
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-09-21
from
KUNKEL, GERHARD
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-09-21
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Quick Facts
- Patent No.
- US 6,566,219
- App. No.
- 09/957,937
- Filed
- 2001-09-21
- Granted
- 2003-05-20
- Pub. No.
- US20020068400A1
- Examiner
- SMOOT, STEPHEN W
- Art Unit
- 2813
- PTA
- -46 days
External Links