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App. No. 09/963,956 · Confirmation No. 1585

INSTALLATION FOR PROCESSING WAFERS

Inventor: Bernhard Heinemann
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-10-31 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-31 LET. Miscellaneous Incoming Letter 1 View
2003-10-31 FRPR Certified Copy of Foreign Priority Application 3 View
2001-09-26 TRNA Transmittal of New Application 1 View
2001-09-26 SPEC Specification 17 View
2001-09-26 CLM Claims 7 View
2001-09-26 ABST Abstract 1 View
2001-09-26 DRW Drawings-only black and white line drawings 2 View
2001-09-26 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/963,956
Filed
2001-09-26
Granted
2004-03-23
Pub. No.
US20020074025A1
Art Unit
1724
PTA
-170 days