IP Library › Granted Patent US 6,664,191
Granted Patent Utility
US 6,664,191 · Confirmation No. 4750

NON SELF-ALIGNED SHALLOW TRENCH ISOLATION PROCESS WITH DISPOSABLE SPACE TO DEFINE SUB-LITHOGRAPHIC POLY SPACE

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2003-10-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-10-09 TRNA Transmittal of New Application 3 View
2001-10-09 SPEC Specification 14 View
2001-10-09 CLM Claims 5 View
2001-10-09 ABST Abstract 1 View
2001-10-09 DRW Drawings-only black and white line drawings 10 View
2001-10-09 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,664,191
App. No.
09/973,131
Filed
2001-10-09
Granted
2003-12-16
Art Unit
1765
PTA
0 days