Granted Patent
Utility
US 6,670,082
· Confirmation No. 7626
SYSTEM AND METHOD FOR CORRECTING 3D EFFECTS IN AN ALTERNATING PHASE-SHIFTING MASK
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-17 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-10-09 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-10-09 | SPEC |
Specification | 15 | View | |
| 2001-10-09 | CLM |
Claims | 10 | View | |
| 2001-10-09 | ABST |
Abstract | 1 | View | |
| 2001-10-09 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-10-09 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Yong Liu
Fremont, CA
Hua-Yu Liu
Palo Alto, CA
Attorneys & Agents of Record
Classification
USPC
430/5
G03F1/30
G03F1/36
Prosecution
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- Customer No.
- 29477
- Docket No.
- NTI-023
- Confirmation No.
- 7626
Publication
- Pub. No.
- US20030068564A1
- Pub. Date
- 2003-04-10
Patent Term Adjustment
0days
CONFIRMATION OF ASSIGNMENT
Recorded 2010-01-13
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-02-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-09
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Quick Facts
- Patent No.
- US 6,670,082
- App. No.
- 09/974,507
- Filed
- 2001-10-09
- Granted
- 2003-12-30
- Pub. No.
- US20030068564A1
- Examiner
- ROSASCO, STEPHEN D
- Art Unit
- 1756
- PTA
- 0 days
External Links