IP Library › Granted Patent US 6,830,854
Granted Patent Utility
US 6,830,854 · Confirmation No. 6170

SYSTEM AND METHOD FOR CORRECTING 3D EFFECTS IN AN ALTERNATING PHASE-SHIFTING MASK

Inventors: Yong Liu, Hua-Yu Liu
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2004-06-28 LET. Miscellaneous Incoming Letter 1 View
2004-04-01 CTNF Non-Final Rejection 5 View
2004-04-01 1449 List of References cited by applicant and considered by examiner 15 View
2004-04-01 892 List of references cited by examiner 1 View
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2003-10-14 TRNA Transmittal of New Application 2 View
2003-10-14 SPEC Specification 16 View
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Quick Facts
Patent No.
US 6,830,854
App. No.
10/685,751
Filed
2003-10-14
Granted
2004-12-14
Pub. No.
US20040076895A1
Art Unit
1756
PTA
0 days