IP Library › Granted Patent US 6,582,535
Granted Patent Utility PCT National Stage
US 6,582,535 · Confirmation No. 3335

TUNGSTEN TARGET FOR SPUTTERING AND METHOD FOR PREPARING THEREOF

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2001-12-05 ABST Abstract 2 View
2001-12-05 LET. Miscellaneous Incoming Letter 27 View
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Quick Facts
Patent No.
US 6,582,535
App. No.
09/980,932
Filed
2001-12-05
Granted
2003-06-24
Art Unit
1753
PTA
0 days