Granted Patent
Utility
PCT National Stage
US 6,723,183
· Confirmation No. 1707
SILICIDE TARGET FOR DEPOSITING LESS EMBRITTLING GATE OXIDE AND METHOD OF MANUFACTURING SILICIDE TARGET
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-06 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2001-12-05 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-12-05 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-12-05 | SPEC |
Specification | 14 | View | |
| 2001-12-05 | CLM |
Claims | 2 | View | |
| 2001-12-05 | ABST |
Abstract | 1 | View | |
| 2001-12-05 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Kunihiro Oda
Ibaraki-ken, JAPAN
Hirohito Miyashita
Ibaraki-ken, JAPAN
Attorneys & Agents of Record
Classification
USPC
148/421
H10D64/01342
C23C14/3414
H10D64/691
C23C14/08
Y10S148/158
Prosecution
- Examiner
- OLTMANS, ANDREW L
- Art Unit
- 1742
- Customer No.
- 270
- Docket No.
- KIN58USA
- Confirmation No.
- 1707
Foreign Priority
2000/183143
·
2000-06-19
·
JAPAN
2000/236538
·
2000-08-04
·
JAPAN
Publication
- Pub. No.
- US20020179195A1
- Pub. Date
- 2002-12-05
Patent Term Adjustment
-34days
CHANGE OF ADDRESS
Recorded 2017-02-07
CHANGE OF NAME/MERGER
Recorded 2011-06-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-26
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Quick Facts
- Patent No.
- US 6,723,183
- App. No.
- 09/980,946
- Filed
- 2001-12-05
- Granted
- 2004-04-20
- Pub. No.
- US20020179195A1
- Examiner
- OLTMANS, ANDREW L
- Art Unit
- 1742
- PTA
- -34 days
External Links