IP Library Granted Patent US 6,750,668
Granted Patent Utility
US 6,750,668 · Confirmation No. 5763

VORTEX UNIT FOR PROVIDING A DESIRED ENVIRONMENT FOR A SEMICONDUCTOR PROCESS

Inventor: Brad Johnson
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Code Description Pages PDF
2004-04-13 IFEE Issue Fee Payment (PTO-85B) 4 View
2004-03-09 NOA Notice of Allowance and Fees Due (PTOL-85) 14 View
2004-03-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-03-09 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-09 FWCLM Index of Claims 1 View
2004-03-05 WFEE Fee Worksheet (SB06) 1 View
2004-03-05 FWCLM Index of Claims 1 View
2004-03-04 WFEE Fee Worksheet (SB06) 1 View
2004-03-04 FWCLM Index of Claims 1 View
2004-02-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-02-26 CLM Claims 6 View
2004-02-26 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-12-30 CTFR Final Rejection 6 View
2003-12-30 FWCLM Index of Claims 1 View
2003-12-30 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-27 WFEE Fee Worksheet (SB06) 1 View
2003-10-27 FWCLM Index of Claims 1 View
2003-10-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2003-10-02 CLM Claims 7 View
2003-10-02 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-07-30 CTNF Non-Final Rejection 4 View
2003-07-30 892 List of references cited by examiner 1 View
2003-07-10 SRNT Examiner's search strategy and results 1 View
2001-10-17 TRNA Transmittal of New Application 4 View
2001-10-17 SPEC Specification 9 View
2001-10-17 CLM Claims 5 View
2001-10-17 ABST Abstract 1 View
2001-10-17 DRW Drawings-only black and white line drawings 2 View
2001-10-17 OATH Oath or Declaration filed 2 View
2001-10-17 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-10-17 SRFW Search information including classification, databases and other search related notes 1 View
2001-10-17 FWCLM Index of Claims 1 View
2001-10-17 TRNA Transmittal of New Application 4 View
2001-10-17 DRW Drawings-only black and white line drawings 2 View
2001-10-17 SPEC Specification 9 View
2001-10-17 CLM Claims 5 View
2001-10-17 ABST Abstract 1 View
2001-10-17 OATH Oath or Declaration filed 2 View
2001-10-17 WFEE Fee Worksheet (SB06) 1 View
2001-10-17 WFEE Fee Worksheet (SB06) 1 View
2001-10-17 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,750,668
App. No.
09/981,200
Filed
2001-10-17
Granted
2004-06-15
Art Unit
2829
PTA
0 days