IP Library Granted Patent US 6,678,055
Granted Patent Utility
US 6,678,055 · Confirmation No. 5092

METHOD AND APPARATUS FOR MEASURING STRESS IN SEMICONDUCTOR WAFERS

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Code Description Pages PDF
2003-10-30 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-02-15 TRNA Transmittal of New Application 2 View
2002-02-15 DRW Drawings-only black and white line drawings 10 View
2001-11-26 TRNA Transmittal of New Application 1 View
2001-11-26 SPEC Specification 31 View
2001-11-26 CLM Claims 14 View
2001-11-26 ABST Abstract 1 View
2001-11-26 DRW Drawings-only black and white line drawings 12 View
2001-11-26 OATH Oath or Declaration filed 3 View
2001-11-26 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,678,055
App. No.
09/991,709
Filed
2001-11-26
Granted
2004-01-13
Pub. No.
US20030098704A1
Art Unit
2877
PTA
0 days