Granted Patent
Utility
US 6,579,786
· Confirmation No. 7585
METHOD FOR DEPOSITING A TWO-LAYER DIFFUSION BARRIER
Inventors
Sven Schmidbauer
Dresden, GERMANY
Alexander Ruf
Dresden, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/618
H10W20/033
H10D64/011
Prosecution
- Examiner
- SOWARD, IDA M
- Art Unit
- 2822
- Docket No.
- 1999P1854
- Confirmation No.
- 7585
Foreign Priority
199 22 557.5
·
1999-05-17
·
GERMANY
Publication
- Pub. No.
- US20020086527A1
- Pub. Date
- 2002-07-04
Patent Term Adjustment
-8days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-08-19
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-05-01
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Quick Facts
- Patent No.
- US 6,579,786
- App. No.
- 09/992,977
- Filed
- 2001-11-19
- Granted
- 2003-06-17
- Pub. No.
- US20020086527A1
- Examiner
- SOWARD, IDA M
- Art Unit
- 2822
- PTA
- -8 days
External Links