Granted Patent
Utility
US 6,630,375
· Confirmation No. 3988
PROCESS FOR MANUFACTURING A SEMICONDUCTOR WAFER, A SEMICONDUCTOR WAFER, PROCESS FOR MANUFACTURING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-12-05 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-12-05 | A.PE |
Preliminary Amendment | 4 | View | |
| 2001-12-05 | SPEC |
Specification | 75 | View | |
| 2001-12-05 | CLM |
Claims | 3 | View | |
| 2001-12-05 | ABST |
Abstract | 1 | View | |
| 2001-12-05 | DRW |
Drawings-only black and white line drawings | 19 | View | |
| 2001-12-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Hiroto Kawagoe
Tokyo, JAPAN
Tatsumi Shirasu
Kawasaki-shi, JAPAN
Shogo Kiyota
Tokyo, JAPAN
Norio Suzuki
Tokyo, JAPAN
Eiichi Yamada
Kumage-gun, JAPAN
Yuji Sugino
Nakakoma-gun, JAPAN
Manabu Kitano
Yanai-shi, JAPAN
Yoshihiko Sakurai
Nakakoma--gun, JAPAN
Takashi Naganuma
Nakakoma-gun, JAPAN
Hisashi Arakawa
Kohfu-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/199
H10D84/857
H10P14/20
H10D84/0167
H10D84/038
Prosecution
- Examiner
- WHITMORE, STACY
- Art Unit
- 2812
- Customer No.
- 20457
- Docket No.
- 501.33873CC3
- Confirmation No.
- 3988
Foreign Priority
6-265529
·
1994-10-28
·
JAPAN
6-176872
·
1994-07-28
·
JAPAN
Publication
- Pub. No.
- US20020055204A1
- Pub. Date
- 2002-05-09
Patent Term Adjustment
0days
Parent
is a Continuation of
→
App. 09/513,349
· US 6,368,905
Filed 2000-02-25
· Patented Case
Parent
is a Continuation of
→
App. 08/934,774
· US 6,043,114
Filed 1997-09-22
· Patented Case
Parent
is a Division of
→
App. 08/508,483
Filed 1995-07-28
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation of
→
App. 10/861,450
Filed 2004-06-07
· Abandoned -- Failure to Respond to an Office Action
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-05-13
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-09-26
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Quick Facts
- Patent No.
- US 6,630,375
- App. No.
- 10/002,147
- Filed
- 2001-12-05
- Granted
- 2003-10-07
- Pub. No.
- US20020055204A1
- Examiner
- WHITMORE, STACY
- Art Unit
- 2812
- PTA
- 0 days
External Links