Granted Patent
Utility
US 6,670,568
· Confirmation No. 2768
INSTALLATION FOR PROCESSING WAFERS
Inventor:
Michael Goetzke
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-11-03 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-11-03 | FOR |
Foreign Reference | 55 | View | |
| 2001-11-07 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-11-07 | SPEC |
Specification | 19 | View | |
| 2001-11-07 | CLM |
Claims | 3 | View | |
| 2001-11-07 | ABST |
Abstract | 1 | View | |
| 2001-11-07 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-11-07 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Michael Goetzke
Immenstaad, GERMANY
Attorneys & Agents of Record
Classification
USPC
209/559
H10P95/00
H10P72/0611
Y10S414/14
Prosecution
- Examiner
- NGUYEN, TUAN N
- Art Unit
- 3653
- Docket No.
- 1999P8053
- Confirmation No.
- 2768
Foreign Priority
199 21 243.0
·
1999-05-07
·
GERMANY
Publication
- Pub. No.
- US20020060172A1
- Pub. Date
- 2002-05-23
Patent Term Adjustment
-4days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-03
from
GOETZKE, MICHAEL
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-11-03
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,670,568
- App. No.
- 10/014,245
- Filed
- 2001-11-07
- Granted
- 2003-12-30
- Pub. No.
- US20020060172A1
- Examiner
- NGUYEN, TUAN N
- Art Unit
- 3653
- PTA
- -4 days
External Links