Granted Patent
Utility
US 6,809,510
· Confirmation No. 6202
CONFIGURATION IN WHICH WAFERS ARE INDIVIDUALLY SUPPLIED TO FABRICATION UNITS AND MEASURING UNITS LOCATED IN A FABRICATION CELL
Inventor:
Michael Goetzke
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-07-20 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-11-07 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-11-07 | SPEC |
Specification | 17 | View | |
| 2001-11-07 | CLM |
Claims | 6 | View | |
| 2001-11-07 | ABST |
Abstract | 1 | View | |
| 2001-11-07 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-11-07 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Michael Goetzke
Immenstaad, GERMANY
Attorneys & Agents of Record
Classification
USPC
324/158.1
H10P72/0612
H10P72/3216
H10P72/0468
Prosecution
- Examiner
- NGUYEN, JIMMY
- Art Unit
- 2829
- Customer No.
- 24131
- Docket No.
- 1999P8052
- Confirmation No.
- 6202
Foreign Priority
199 21 245.7
·
1999-05-07
·
GERMANY
Publication
- Pub. No.
- US20020064954A1
- Pub. Date
- 2002-05-30
Patent Term Adjustment
-5days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-03
from
GOETZKE, MICHAEL
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-07-20
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Quick Facts
- Patent No.
- US 6,809,510
- App. No.
- 10/015,150
- Filed
- 2001-11-07
- Granted
- 2004-10-26
- Pub. No.
- US20020064954A1
- Examiner
- NGUYEN, JIMMY
- Art Unit
- 2829
- PTA
- -5 days
External Links