IP Library › Granted Patent US 6,716,748
Granted Patent Utility
US 6,716,748 · Confirmation No. 4743

REACTION CHAMBER FOR PROCESSING A SUBSTRATE WAFER, AND METHOD FOR OPERATING THE CHAMBER

Inventor: Alfred Kersch
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-02-09 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-11-05 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-05 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-11-05 892 List of references cited by examiner 1 View
2003-11-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-05 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-27 SRNT Examiner's search strategy and results 1 View
2003-10-03 WFEE Fee Worksheet (SB06) 1 View
2003-09-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-15 CLM Claims 5 View
2003-09-15 SPEC Specification 1 View
2003-09-15 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-06-11 CTNF Non-Final Rejection 5 View
2003-06-11 892 List of references cited by examiner 1 View
2003-06-11 1449 List of References cited by applicant and considered by examiner 1 View
2003-04-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-04-14 PA.. Power of Attorney 1 View
2003-03-25 CTNF Non-Final Rejection 4 View
2002-03-12 OATH Oath or Declaration filed 3 View
2002-03-12 LET. Miscellaneous Incoming Letter 2 View
2002-03-12 FRPR Certified Copy of Foreign Priority Application 16 View
2002-02-12 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-01-15 TRNA Transmittal of New Application 1 View
2002-01-15 SPEC Specification 14 View
2002-01-15 CLM Claims 3 View
2002-01-15 ABST Abstract 1 View
2002-01-15 DRW Drawings-only black and white line drawings 2 View
2002-01-15 OATH Oath or Declaration filed 2 View
2002-01-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-01-15 SRFW Search information including classification, databases and other search related notes 1 View
2002-01-15 FWCLM Index of Claims 1 View
2002-01-15 TRNA Transmittal of New Application 1 View
2002-01-15 DRW Drawings-only black and white line drawings 2 View
2002-01-15 SPEC Specification 14 View
2002-01-15 CLM Claims 3 View
2002-01-15 ABST Abstract 1 View
2002-01-15 OATH Oath or Declaration filed 2 View
2002-01-15 WFEE Fee Worksheet (SB06) 1 View
2002-01-15 WFEE Fee Worksheet (SB06) 1 View
2002-01-15 WCLM Claims Worksheet (PTO-2022) 1 View
2002-01-15 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-01-15 FOR Foreign Reference 4 View
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Quick Facts
Patent No.
US 6,716,748
App. No.
10/047,814
Filed
2002-01-15
Granted
2004-04-06
Pub. No.
US20020092840A1
Art Unit
2823
PTA
-8 days