Granted Patent
Utility
US 6,670,259
· Confirmation No. 9618
INERT ATOM IMPLANTATION METHOD FOR SOI GETTERING
Inventor:
Simon Siu-Sing Chan
Patented Case
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-24 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-02-05 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-02-05 | SPEC |
Specification | 23 | View | |
| 2002-02-05 | CLM |
Claims | 4 | View | |
| 2002-02-05 | ABST |
Abstract | 1 | View | |
| 2002-02-05 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-02-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Simon Siu-Sing Chan
Saratoga, CA
Classification
USPC
438/473
H10P30/204
H10P36/07
H10P30/208
H10W10/181
H10P30/225
H10P90/1914
Prosecution
- Examiner
- LUU, CHUONG A
- Art Unit
- 2825
- Docket No.
- F0586
- Confirmation No.
- 9618
Patent Term Adjustment
0days
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
RELEASE OF SECURITY INTEREST
Recorded 2020-11-20
from
GLOBALFOUNDRIES INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-11-02
from
GLOBALFOUNDRIES INC.
SECURITY AGREEMENT
Recorded 2018-11-29
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
from
CHAN, SIMON SIU-SING
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-05
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Quick Facts
- Patent No.
- US 6,670,259
- App. No.
- 10/068,396
- Filed
- 2002-02-05
- Granted
- 2003-12-30
- Examiner
- LUU, CHUONG A
- Art Unit
- 2825
- PTA
- 0 days
External Links