IP Library › Granted Patent US 6,559,067
Granted Patent Utility
US 6,559,067 · Confirmation No. 5076

METHOD FOR PATTERNING AN ORGANIC ANTIREFLECTION LAYER

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2008-04-25 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2008-04-25 TRAN.LET Transmittal Letter 2 View
2008-04-25 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-04-25 FOR Foreign Reference 1 View
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2008-04-25 FOR Foreign Reference 1 View
2008-04-25 FOR Foreign Reference 1 View
2008-04-25 FOR Foreign Reference 2 View
2008-04-25 FOR Foreign Reference 2 View
2008-04-25 FOR Foreign Reference 2 View
2002-02-11 TRNA Transmittal of New Application 1 View
2002-02-11 SPEC Specification 10 View
2002-02-11 CLM Claims 1 View
2002-02-11 ABST Abstract 1 View
2002-02-11 DRW Drawings-only black and white line drawings 2 View
2002-02-11 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,559,067
App. No.
10/073,554
Filed
2002-02-11
Granted
2003-05-06
Pub. No.
US20020160618A1
Examiner
TRINH, HOA B
Art Unit
2814
PTA
-3 days