Granted Patent
Utility
US 6,670,646
· Confirmation No. 7293
MASK AND METHOD FOR PATTERNING A SEMICONDUCTOR WAFER
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-06 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2002-02-11 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-02-11 | SPEC |
Specification | 15 | View | |
| 2002-02-11 | CLM |
Claims | 5 | View | |
| 2002-02-11 | ABST |
Abstract | 1 | View | |
| 2002-02-11 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-02-11 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
257/98
G03F1/30
G03F1/36
G03F7/70441
Prosecution
- Examiner
- NHU, DAVID
- Art Unit
- 2818
- Docket No.
- 01-P-11905 US
- Confirmation No.
- 7293
Publication
- Pub. No.
- US20030153126A1
- Pub. Date
- 2003-08-14
Patent Term Adjustment
-6days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-21
RE-RECORD TO CORRET THE SPELLING OF FIRST ASSIGNOR'S FIRST NAME, PREVIOUSLY RECORDED AT REE/FRAME: 012617/0180
Recorded 2002-11-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-11
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,670,646
- App. No.
- 10/074,479
- Filed
- 2002-02-11
- Granted
- 2003-12-30
- Pub. No.
- US20030153126A1
- Examiner
- NHU, DAVID
- Art Unit
- 2818
- PTA
- -6 days
External Links