Granted Patent
Utility
US 6,576,565
· Confirmation No. 6934
RTCVD PROCESS AND REACTOR FOR IMPROVED CONFORMALITY AND STEP-COVERAGE
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-02-14 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-02-14 | SPEC |
Specification | 25 | View | |
| 2002-02-14 | CLM |
Claims | 6 | View | |
| 2002-02-14 | ABST |
Abstract | 1 | View | |
| 2002-02-14 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-02-14 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Ashima Chakravarti
Hopewell Junction, NY
Oleg Gluschenkov
Wappingers Falls, NY
Irene Lennox McStay
Hopewell Junction, NY
Attorneys & Agents of Record
Classification
USPC
438/758
C23C16/45572
H10B12/038
H10P14/6334
H10P72/0434
H10P72/0436
H10P14/69215
C23C16/045
C23C16/481
C23C16/52
Prosecution
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- Docket No.
- 01-P-15767 US
- Confirmation No.
- 6934
Patent Term Adjustment
-2days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-12-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-14
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-14
from
MCSTAY, IRENE LENNOX
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-14
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Quick Facts
- Patent No.
- US 6,576,565
- App. No.
- 10/075,152
- Filed
- 2002-02-14
- Granted
- 2003-06-10
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- PTA
- -2 days
External Links