Granted Patent
Utility
US 6,569,772
· Confirmation No. 8628
METHOD FOR PRODUCING AN ALTERNATING PHASE MASK
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-02-14 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-02-14 | SPEC |
Specification | 14 | View | |
| 2002-02-14 | CLM |
Claims | 4 | View | |
| 2002-02-14 | ABST |
Abstract | 1 | View | |
| 2002-02-14 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-02-14 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Josef Mathuni
Munchen, GERMANY
Jurgen Knobloch
Munchen, GERMANY
Christoph Nolscher
Nurnberg, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/701
G03F1/30
Prosecution
- Examiner
- HOANG, QUOC DINH
- Art Unit
- 2818
- Docket No.
- P2001,0094
- Confirmation No.
- 8628
Foreign Priority
101 06 819.0
·
2001-02-14
·
GERMANY
Publication
- Pub. No.
- US20020127480A1
- Pub. Date
- 2002-09-12
Patent Term Adjustment
-5days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-04-07
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Quick Facts
- Patent No.
- US 6,569,772
- App. No.
- 10/075,540
- Filed
- 2002-02-14
- Granted
- 2003-05-27
- Pub. No.
- US20020127480A1
- Examiner
- HOANG, QUOC DINH
- Art Unit
- 2818
- PTA
- -5 days
External Links