IP Library › Granted Patent US 6,706,576
Granted Patent Utility
US 6,706,576 · Confirmation No. 1062

LASER THERMAL ANNEALING OF SILICON NITRIDE FOR INCREASED DENSITY AND ETCH SELECTIVITY

Inventors: Minh Van Ngo, Angela Hui
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2003-12-18 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-09-24 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-09-24 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-09-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-09-24 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-21 SRNT Examiner's search strategy and results 7 View
2003-07-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-07-23 CLM Claims 6 View
2003-07-23 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-04-23 CTNF Non-Final Rejection 8 View
2003-04-18 SRNT Examiner's search strategy and results 7 View
2003-02-06 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-02-06 SPEC Specification 1 View
2003-02-06 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2002-11-06 CTNF Non-Final Rejection 8 View
2002-11-06 892 List of references cited by examiner 1 View
2002-11-06 892 List of references cited by examiner 1 View
2002-11-06 FOR Foreign Reference 6 View
2002-06-03 LET. Miscellaneous Incoming Letter 2 View
2002-06-03 DRW Drawings-only black and white line drawings 4 View
2002-06-03 TRNA Transmittal of New Application 2 View
2002-06-03 DRW Drawings-only black and white line drawings 4 View
2002-04-24 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-03-14 TRNA Transmittal of New Application 3 View
2002-03-14 SPEC Specification 7 View
2002-03-14 CLM Claims 3 View
2002-03-14 ABST Abstract 1 View
2002-03-14 DRW Drawings-only black and white line drawings 4 View
2002-03-14 OATH Oath or Declaration filed 2 View
2002-03-14 WFEE Fee Worksheet (SB06) 1 View
2002-03-14 WFEE Fee Worksheet (SB06) 1 View
2002-03-14 WCLM Claims Worksheet (PTO-2022) 1 View
2002-03-14 FWCLM Index of Claims 1 View
2002-03-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-03-14 SRFW Search information including classification, databases and other search related notes 1 View
2002-03-14 TRNA Transmittal of New Application 3 View
2002-03-14 SPEC Specification 7 View
2002-03-14 CLM Claims 3 View
2002-03-14 ABST Abstract 1 View
2002-03-14 DRW Drawings-only black and white line drawings 4 View
2002-03-14 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,706,576
App. No.
10/096,741
Filed
2002-03-14
Granted
2004-03-16
Art Unit
2812
PTA
0 days