IP Library › Granted Patent US 6,649,527
Granted Patent Utility
US 6,649,527 · Confirmation No. 7968

METHOD OF ETCHING A SUBSTRATE

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2016-07-05 OATH Oath or Declaration filed 21 View
2015-01-19 OATH Oath or Declaration filed 3 View
2003-09-17 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-03-27 TRNA Transmittal of New Application 4 View
2002-03-27 A.PE Preliminary Amendment 3 View
2002-03-27 SPEC Specification 8 View
2002-03-27 CLM Claims 3 View
2002-03-27 ABST Abstract 1 View
2002-03-27 DRW Drawings-only black and white line drawings 1 View
2002-03-27 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,649,527
App. No.
10/106,823
Filed
2002-03-27
Granted
2003-11-18
Pub. No.
US20020142608A1
Art Unit
1765
PTA
0 days