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App. No. 10/118,946 · Confirmation No. 9526

METHOD OF FORMING LOW DIELECTRIC SILICON OXYNITRIDE SPACER FILMS HIGHLY SELECTIVE TO ETCHANTS

Inventor: John T. Moore
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-06-27 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-06-27 LET. Miscellaneous Incoming Letter 2 View
2002-04-10 TRNA Transmittal of New Application 2 View
2002-04-10 A.PE Preliminary Amendment 3 View
2002-04-10 SPEC Specification 16 View
2002-04-10 CLM Claims 12 View
2002-04-10 ABST Abstract 1 View
2002-04-10 DRW Drawings-only black and white line drawings 5 View
2002-04-10 OATH Oath or Declaration filed 6 View
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Quick Facts
App. No.
10/118,946
Filed
2002-04-10
Granted
2003-09-23
Pub. No.
US20020111039A1
Art Unit
2823
PTA
0 days