IP Library › Granted Patent US 6,740,595
Granted Patent Utility
US 6,740,595 · Confirmation No. 6805

ETCH PROCESS FOR RECESSING POLYSILICON IN TRENCH STRUCTURES

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2004-04-19 IFEE Issue Fee Payment (PTO-85B) 3 View
2004-02-13 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-02-13 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-02-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-10 A.NE Response After Final Action 2 View
2003-11-10 CLM Claims 4 View
2003-11-10 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-08-11 CTFR Final Rejection 7 View
2003-05-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-05-29 CLM Claims 3 View
2003-05-29 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-03-27 CTNF Non-Final Rejection 6 View
2003-03-27 1449 List of References cited by applicant and considered by examiner 1 View
2003-03-27 892 List of references cited by examiner 1 View
2003-01-03 ELC. Response to Election / Restriction Filed 2 View
2003-01-03 XT/ Extension of Time 1 View
2002-11-13 CTRS Requirement for Restriction/Election 5 View
2002-07-31 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-04-12 TRNA Transmittal of New Application 1 View
2002-04-12 ADS Application Data Sheet 4 View
2002-04-12 SPEC Specification 20 View
2002-04-12 CLM Claims 3 View
2002-04-12 ABST Abstract 1 View
2002-04-12 DRW Drawings-only black and white line drawings 8 View
2002-04-12 OATH Oath or Declaration filed 20 View
2002-04-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-04-12 FWCLM Index of Claims 1 View
2002-04-12 SRFW Search information including classification, databases and other search related notes 1 View
2002-04-12 TRNA Transmittal of New Application 1 View
2002-04-12 DRW Drawings-only black and white line drawings 8 View
2002-04-12 SPEC Specification 20 View
2002-04-12 CLM Claims 3 View
2002-04-12 ABST Abstract 1 View
2002-04-12 OATH Oath or Declaration filed 20 View
2002-04-12 WFEE Fee Worksheet (SB06) 1 View
2002-04-12 WFEE Fee Worksheet (SB06) 2 View
2002-04-12 WCLM Claims Worksheet (PTO-2022) 1 View
2002-04-12 ADS Application Data Sheet 4 View
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Quick Facts
Patent No.
US 6,740,595
App. No.
10/122,996
Filed
2002-04-12
Granted
2004-05-25
Pub. No.
US20030194867A1
Art Unit
2813
PTA
0 days