Granted Patent
Utility
US 6,569,776
· Confirmation No. 8218
METHOD OF REMOVING SILICON NITRIDE FILM FORMED ON A SURFACE OF A MATERIAL WITH A PROCESS GAS CONTAINING A HIGHER-ORDER FLUOROCARBON IN COMBINATION WITH A LOWER-ORDER FLUOROCARBON
Inventor:
Yasuhiko Ueda
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-04-18 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-04-18 | SPEC |
Specification | 20 | View | |
| 2002-04-18 | CLM |
Claims | 4 | View | |
| 2002-04-18 | ABST |
Abstract | 1 | View | |
| 2002-04-18 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2002-04-18 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Yasuhiko Ueda
Minato-ku, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/724
H10P50/242
H10P70/234
H10W20/069
H10W20/076
H10P50/283
Prosecution
- Examiner
- OWENS, BETH E
- Art Unit
- 2824
- Customer No.
- 23373
- Docket No.
- Q69648
- Confirmation No.
- 8218
Foreign Priority
2001-124259
·
2001-04-23
·
JAPAN
Publication
- Pub. No.
- US20020155726A1
- Pub. Date
- 2002-10-24
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-08-21
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-06
from
UEDA, YASUHIKO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-04-18
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Quick Facts
- Patent No.
- US 6,569,776
- App. No.
- 10/124,398
- Filed
- 2002-04-18
- Granted
- 2003-05-27
- Pub. No.
- US20020155726A1
- Examiner
- OWENS, BETH E
- Art Unit
- 2824
- PTA
- 0 days
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