IP Library › Granted Patent US 6,764,920
Granted Patent Utility
US 6,764,920 · Confirmation No. 4074

METHOD FOR REDUCING SHALLOW TRENCH ISOLATION EDGE THINNING ON TUNNEL OXIDES USING PARTIAL NITRIDE STRIP AND SMALL BIRD'S BEAK FORMATION FOR HIGH PERFORMANCE FLASH MEMORY DEVICES

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Quick Facts
Patent No.
US 6,764,920
App. No.
10/126,840
Filed
2002-04-19
Granted
2004-07-20
Art Unit
2825
PTA
-47 days