Oxide sintered body and manufacturing method thereof
View Patent ↗The present invention relates to an oxide sintered body having a perovskite structure represented with a chemical formula of MRuO 3 (M: one or more types among Ca, Sr, Ba), characterized in that the total content of alkali metals such as Na, K, and Fe, Ni, Co, Cr, Cu, Al is 100 ppm or less, the content of respective elements U, Th is 10 ppb or less, and the relative density is 90% or more, and provides an oxide sintered body and the manufacturing method thereof having a pervoskite structure represented with the chemical formula MRuO 3 (M: one or more types among Ca, Sr, Ba) by using a MRuO 3 sintered body raw material refined to a high density of 4N or more, which enables sintering at low temperatures, and which is capable of obtaining a high-density sintered body.
1. A method of manufacturing an oxide sintered body, comprising the steps of:
covering a die with oxide ceramic, Al 2 O 3 , ZrO 2 , Si 3 N 4 , Ru, Pt, Ir, Co or Ni; and
pressure sintering an oxide powder in said die at a sintering temperature of 1200° C. to 1400° C. to form an oxide sintered body having a perovskite structure represented with a chemical formula of MRuO 3 , wherein M represents at least one of Ca, Sr and Ba, and wherein a total content of alkali metals including Na, X, and Fe, Ni, Co, Cr, Cu, Al is 100 ppm or less, and a content of elements U and Th is 10 ppb or less, and wherein said oxide sintered body is has a relative density of 90% or more.
2. A method according to claim 1 , wherein said pressure sintering step is conducted with a hot press at a pressurization of 200 kg/cm 2 or more.
3. A mod according to claim 1 , wherein said relative density is 95% or more.
4. A method according to claim 3 , wherein said pressure sintering step is conducted with a hot press at a pressurization of 200 kg/cm 2 or more.