Granted Patent
Utility
US 6,594,546
· Confirmation No. 3865
PLANT FOR PROCESSING WAFERS
Inventor:
Jurgen Elger
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-04-29 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-04-29 | SPEC |
Specification | 18 | View | |
| 2002-04-29 | CLM |
Claims | 9 | View | |
| 2002-04-29 | ABST |
Abstract | 1 | View | |
| 2002-04-29 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-04-29 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Jurgen Elger
Pyrbaum, GERMANY
Attorneys & Agents of Record
Classification
USPC
700/213
H10P72/0618
H10P72/3411
H10P72/0612
H10P72/3402
Y10S414/14
Prosecution
- Examiner
- TRAN, KHOI H
- Art Unit
- 3651
- Docket No.
- 1999P5140
- Confirmation No.
- 3865
Foreign Priority
199 52 194.8
·
1999-10-29
·
GERMANY
Publication
- Pub. No.
- US20020159879A1
- Pub. Date
- 2002-10-31
Patent Term Adjustment
-5days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-08-19
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Quick Facts
- Patent No.
- US 6,594,546
- App. No.
- 10/134,125
- Filed
- 2002-04-29
- Granted
- 2003-07-15
- Pub. No.
- US20020159879A1
- Examiner
- TRAN, KHOI H
- Art Unit
- 3651
- PTA
- -5 days
External Links