IP Library › Granted Patent US 6,821,187
Granted Patent Utility PCT National Stage
US 6,821,187 · Confirmation No. 6015

METHOD FOR CHEMICAL-MECHANICAL POLISHING OF LAYERS MADE FROM METALS FROM THE PLATINUM GROUP

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2002-05-29 FWCLM Index of Claims 1 View
2002-05-29 TRNA Transmittal of New Application 3 View
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Quick Facts
Patent No.
US 6,821,187
App. No.
10/148,241
Filed
2002-10-15
Effective Filing
2002-05-29
Granted
2004-11-23
Pub. No.
US20030092360A1
Art Unit
3723
PTA
-126 days