IP Library Patent Application 10150282
Patent Application Utility
App. No. 10/150,282 · Confirmation No. 1627

METHOD FOR MINIMIZING NITRIDE RESIDUE ON A SILICON WAFER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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Code Description Pages PDF
2002-05-15 TRNA Transmittal of New Application 3 View
2002-05-15 SPEC Specification 10 View
2002-05-15 CLM Claims 3 View
2002-05-15 ABST Abstract 1 View
2002-05-15 DRW Drawings-only black and white line drawings 4 View
2002-05-15 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/150,282
Filed
2002-05-15
Granted
2003-08-12
Art Unit
2898
PTA
0 days