Granted Patent
Utility
US 6,800,556
· Confirmation No. 7879
POLISHING METHOD USING CERIA SLURRY, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Inventor:
Toshiyasu Beppu
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-08-25 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-06-04 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-04 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-06-04 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-06-04 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-06-04 | FWCLM |
Index of Claims | 1 | View | |
| 2004-06-04 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-10 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-05-10 | CLM |
Claims | 3 | View | |
| 2004-05-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2004-05-10 | XT/ |
Extension of Time | 1 | View | |
| 2004-05-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-05-10 | FWCLM |
Index of Claims | 1 | View | |
| 2004-01-09 | CTNF |
Non-Final Rejection | 7 | View | |
| 2004-01-09 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-01-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-01-09 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-01-09 | FWCLM |
Index of Claims | 1 | View | |
| 2003-12-30 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2002-05-29 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-05-29 | SPEC |
Specification | 13 | View | |
| 2002-05-29 | CLM |
Claims | 3 | View | |
| 2002-05-29 | ABST |
Abstract | 1 | View | |
| 2002-05-29 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2002-05-29 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-05-29 | FRPR |
Certified Copy of Foreign Priority Application | 21 | View | |
| 2002-05-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-05-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-05-29 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2002-05-29 | FOR |
Foreign Reference | 10 | View | |
| 2002-05-29 | FOR |
Foreign Reference | 14 | View | |
| 2002-05-29 | FOR |
Foreign Reference | 11 | View |
Inventors
Toshiyasu Beppu
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/691
B24B37/042
H10P52/402
Foreign Priority
2001-163102
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2001-05-30
·
JAPAN
Publication
- Pub. No.
- US20020187637A1
- Pub. Date
- 2002-12-12
Patent Term Adjustment
-31days
No related applications found.
CHANGE OF ADDRESS
Recorded 2017-11-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-04-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-09-10
from
BEPPU, TOSHIYASU
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-05-29
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