Method of attaching a semiconductor chip to a chip mounting substrate
View Patent ↗A semiconductor chip, substrate employing plural bonding steps to ensure complete bonding particularly of peripheral edges. Embodiments include placing an adhesive layer on a chip mounting substrate positioned on a first supporting device, pressing a semiconductor chip against the chip mounting substrate to bond the semiconductor chip temporarily to the chip mounting substrate temporarily bonded chip on a second supporting device, and applying chip to straighten warpage and to bond the chip entirely to the chip mounting substrate.
1. A semiconductor device producing method comprising:
a chip mounting substrate feeding process of placing a semiconductor chip mounting substrate provided with a predetermined adhesive layer on a first supporting device included in a chip mounting unit for mounting a semiconductor chip on the semiconductor chip mounting substrate;
a chip bonding process of temporarily bonding the semiconductor chip to the semiconductor chip mounting substrate by pressing the semiconductor chip against the semiconductor chip mounting substrate;
a transfer process of transferring the semiconductor chip mounting substrate to which the semiconductor chip is bonded temporarily by the chip bonding process from the first supporting device to a second supporting device; and
a pressing process of pressing the semiconductor chip firmly against the semiconductor chip mounting substrate to bond the semiconductor chip entirely to the semiconductor chip mounting substrate.
2. The semiconductor device producing method according to claim 1 , wherein the pressing process heats the semiconductor chip.
3. The semiconductor device producing method according to claim 1 , wherein, in the pressing process, the semiconductor chip is pressed by a heating tool having a pressing surface area greater than that of the semiconductor chip.
4. A semiconductor device producing method comprising steps of:
placing a semiconductor chip mounting substrate provided with a predetermined adhesive layer on a first supporting device;
bonding a semiconductor chip to the semiconductor chip mounting substrate by pressing the semiconductor chip against the adhesive layer using a first pressing tool;
after the bonding step, transferring the semiconductor chip mounting substrate to which the semiconductor chip is bonded by the chip bonding process from the first supporting device to a second supporting device; and
after the transferring step, pressing the semiconductor chip against the adhesive layer using a second pressing tool, wherein
pressed area on the semiconductor chip by the second pressing tool is greater than that by the first pressing tool.
5. The semiconductor device producing method according to claim 4 , wherein, in the pressing step by the second pressing tool, heats the semiconductor chip via the second pressing tool.