IP Library › Granted Patent US 6,824,932
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US 6,824,932 · Confirmation No. 9274

SELF-ALIGNED ALTERNATING PHASE SHIFT MASK PATTERNING PROCESS

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2004-11-16 BIB Bibliographic Data Sheet 1 View
2004-10-14 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-10-14 C.AD Change of Address 1 View
2004-09-01 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-09-01 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-09-01 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-09-01 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-02 WFEE Fee Worksheet (SB06) 1 View
2004-08-02 FWCLM Index of Claims 1 View
2004-07-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-07-12 CLM Claims 5 View
2004-07-12 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2004-04-12 CTNF Non-Final Rejection 6 View
2004-04-12 1449 List of References cited by applicant and considered by examiner 1 View
2004-04-12 892 List of references cited by examiner 1 View
2004-04-12 FWCLM Index of Claims 1 View
2004-04-12 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-18 ELC. Response to Election / Restriction Filed 1 View
2004-03-18 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-02-20 CTNF Non-Final Rejection 5 View
2004-02-20 SRFW Search information including classification, databases and other search related notes 1 View
2002-06-05 TRNA Transmittal of New Application 1 View
2002-06-05 ADS Application Data Sheet 1 View
2002-06-05 SPEC Specification 12 View
2002-06-05 CLM Claims 3 View
2002-06-05 ABST Abstract 1 View
2002-06-05 DRW Drawings-only black and white line drawings 5 View
2002-06-05 OATH Oath or Declaration filed 7 View
2002-06-05 WFEE Fee Worksheet (SB06) 1 View
2002-06-05 WFEE Fee Worksheet (SB06) 1 View
2002-06-05 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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Quick Facts
Patent No.
US 6,824,932
App. No.
10/164,242
Filed
2002-06-05
Granted
2004-11-30
Pub. No.
US20030228526A1
Art Unit
1756
PTA
0 days