Granted Patent
Utility
US 6,652,370
· Confirmation No. 5626
METHOD AND APPARATUS FOR MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC SUBSTRATES
Inventor:
Scott E. Moore
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-08-21 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-08-21 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2003-08-21 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2002-06-10 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-06-10 | ADS |
Application Data Sheet | 2 | View | |
| 2002-06-10 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-06-10 | SPEC |
Specification | 14 | View | |
| 2002-06-10 | CLM |
Claims | 17 | View | |
| 2002-06-10 | ABST |
Abstract | 1 | View | |
| 2002-06-10 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-06-10 | OATH |
Oath or Declaration filed | 10 | View |
Inventors
Scott E. Moore
Meridian, ID
Attorneys & Agents of Record
Classification
USPC
451/530
H10P52/00
B24B37/26
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Docket No.
- 500390.13
- Confirmation No.
- 5626
Publication
- Pub. No.
- US20020173171A1
- Pub. Date
- 2002-11-21
Patent Term Adjustment
-102days
Parent
is a Continuation of
→
App. 09/924,066
· US 6,419,572
Filed 2001-08-07
· Patented Case
Parent
is a Division of
→
App. 09/444,754
· US 6,354,930
Filed 1999-11-22
· Patented Case
Parent
is a Continuation of
→
App. 09/001,333
· US 6,139,402
Filed 1997-12-30
· Patented Case
Child
is a Continuation of
→
App. 10/683,972
· US 6,913,519
Filed 2003-10-10
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,652,370
- App. No.
- 10/167,102
- Filed
- 2002-06-10
- Granted
- 2003-11-25
- Pub. No.
- US20020173171A1
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- -102 days
External Links