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App. No. 10/188,532 · Confirmation No. 2490

LITHOGRAPHY METHOD FOR PREVENTING LITHOGRAPHIC EXPOSURE OF PERIPHERAL REGION OF SEMICONDUCTOR WAFER

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2004-01-26 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-28 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-28 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-10-28 1449 List of References cited by applicant and considered by examiner 1 View
2003-10-28 892 List of references cited by examiner 1 View
2003-10-28 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-20 SRNT Examiner's search strategy and results 1 View
2002-07-03 TRNA Transmittal of New Application 4 View
2002-07-03 SPEC Specification 15 View
2002-07-03 CLM Claims 5 View
2002-07-03 ABST Abstract 1 View
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2002-07-03 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/188,532
Filed
2002-07-03
Granted
2004-03-30
Pub. No.
US20040005516A1
Art Unit
1756
PTA
0 days