Granted Patent
Utility
US 6,707,123
· Confirmation No. 2871
EUV REFLECTION MASK
Inventor:
Jenspeter Rau
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-12-22 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-09-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-09-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-09-17 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-09-17 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-09-17 | FWCLM |
Index of Claims | 1 | View | |
| 2003-09-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-09-17 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2003-08-28 | CLM |
Claims | 4 | View | |
| 2003-08-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-08-06 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-08-06 | SPEC |
Specification | 4 | View | |
| 2003-08-06 | CLM |
Claims | 2 | View | |
| 2003-08-06 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2003-08-06 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-08-06 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2003-05-01 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-05-01 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-05-01 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-04-28 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-04-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-03-28 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2002-09-09 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-09-09 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2002-09-09 | PA.. |
Power of Attorney | 1 | View | |
| 2002-09-09 | FRPR |
Certified Copy of Foreign Priority Application | 16 | View | |
| 2002-08-15 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2002-07-15 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-07-15 | SPEC |
Specification | 10 | View | |
| 2002-07-15 | CLM |
Claims | 3 | View | |
| 2002-07-15 | ABST |
Abstract | 1 | View | |
| 2002-07-15 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-07-15 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-07-15 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-07-15 | SPEC |
Specification | 10 | View | |
| 2002-07-15 | CLM |
Claims | 3 | View | |
| 2002-07-15 | ABST |
Abstract | 1 | View | |
| 2002-07-15 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-07-15 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-07-15 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2002-07-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-15 | FWCLM |
Index of Claims | 1 | View | |
| 2002-07-15 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-07-15 | SRFW |
Search information including classification, databases and other search related notes | 1 | View |
Inventors
Jenspeter Rau
Munchen, GERMANY
Attorneys & Agents of Record
Classification
USPC
257/431
G03F1/22
B82Y10/00
B82Y40/00
G03F1/24
Y10S257/911
Prosecution
- Examiner
- NHU, DAVID
- Art Unit
- 2818
- Customer No.
- 24131
- Docket No.
- MUH-12259
- Confirmation No.
- 2871
Foreign Priority
101 34 231.4
·
2001-07-13
·
GERMANY
Publication
- Pub. No.
- US20030013216A1
- Pub. Date
- 2003-01-16
Patent Term Adjustment
-5days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-30
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Quick Facts
- Patent No.
- US 6,707,123
- App. No.
- 10/195,179
- Filed
- 2002-07-15
- Granted
- 2004-03-16
- Pub. No.
- US20030013216A1
- Examiner
- NHU, DAVID
- Art Unit
- 2818
- PTA
- -5 days
External Links