IP Library › Granted Patent US 6,677,218
Granted Patent Utility
US 6,677,218 · Confirmation No. 7520

METHOD FOR FILLING TRENCHES IN INTEGRATED SEMICONDUCTOR CIRCUITS

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2003-08-25 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-31 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-07-31 FOR Foreign Reference 32 View
2003-07-22 A.NE Response After Final Action 1 View
2003-07-22 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2002-07-31 TRNA Transmittal of New Application 2 View
2002-07-31 SPEC Specification 34 View
2002-07-31 CLM Claims 9 View
2002-07-31 ABST Abstract 1 View
2002-07-31 DRW Drawings-only black and white line drawings 8 View
2002-07-31 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,677,218
App. No.
10/210,374
Filed
2002-07-31
Granted
2004-01-13
Pub. No.
US20030032259A1
Art Unit
2823
PTA
-120 days