Granted Patent
Utility
US 6,521,494
· Confirmation No. 1018
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES UTILIZING UNDERLAYER-DEPENDENCY OF DEPOSITION OF CAPACITOR ELECTRODE FILM, AND SEMICONDUCTOR DEVICE
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-08-05 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-08-05 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-08-05 | SPEC |
Specification | 86 | View | |
| 2002-08-05 | CLM |
Claims | 16 | View | |
| 2002-08-05 | ABST |
Abstract | 1 | View | |
| 2002-08-05 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2002-08-05 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Yuichi Matsui
Kokubunji, JAPAN
Masahiko Hiratani
Akishima, JAPAN
Yasuhiro Shimamoto
Hachioji, JAPAN
Yoshitaka Nakamura
Ome, JAPAN
Toshihide Nabatame
Hitachi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/239
H10B12/00
H10D1/692
H10B12/315
H10P14/432
Prosecution
- Examiner
- TRAN, LONG K
- Art Unit
- 2818
- Customer No.
- 24956
- Confirmation No.
- 1018
Foreign Priority
2000-021758
·
2000-01-26
·
JAPAN
Publication
- Pub. No.
- US20020192896A1
- Pub. Date
- 2002-12-19
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-08-21
from
HIRATANI, MASAHIKO,
MATSUI, YUICHI,
SHIMAMOTO, YASUHIRO,
NABATAME, TOSHIHIDE,
NAKAMURA, YOSHITAKA
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-06-23
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,521,494
- App. No.
- 10/211,569
- Filed
- 2002-08-05
- Granted
- 2003-02-18
- Pub. No.
- US20020192896A1
- Examiner
- TRAN, LONG K
- Art Unit
- 2818
- PTA
- 0 days
External Links