Granted Patent
Utility
US 6,559,069
· Confirmation No. 4809
PROCESS FOR THE ELECTROCHEMICAL OXIDATION OF A SEMICONDUCTOR SUBSTRATE
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-08-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-08-08 | SPEC |
Specification | 32 | View | |
| 2002-08-08 | CLM |
Claims | 3 | View | |
| 2002-08-08 | ABST |
Abstract | 1 | View | |
| 2002-08-08 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-08-08 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Matthias Goldbach
Dresden, GERMANY
Albert Birner
Dresden, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/770
H10P14/6309
H10B12/0387
H10D1/047
H10P14/6324
H10P50/613
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Docket No.
- P2001,0561
- Confirmation No.
- 4809
Foreign Priority
101 38 981.7
·
2001-08-08
·
GERMANY
Publication
- Pub. No.
- US20030032304A1
- Pub. Date
- 2003-02-13
Patent Term Adjustment
-4days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-03-20
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Quick Facts
- Patent No.
- US 6,559,069
- App. No.
- 10/215,151
- Filed
- 2002-08-08
- Granted
- 2003-05-06
- Pub. No.
- US20030032304A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- -4 days
External Links