Patent Application
Utility
App. No. 10/215,226
· Confirmation No. 6014
MEHTOD FOR DETECTING REMOVAL OF ORGANIC MATERIAL FROM A SEMICONDUCTOR DEVICE IN A MANUFACTURING PROCESS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-02-02 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-08-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-08-08 | SPEC |
Specification | 14 | View | |
| 2002-08-08 | CLM |
Claims | 3 | View | |
| 2002-08-08 | ABST |
Abstract | 1 | View | |
| 2002-08-08 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-08-08 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Veronika Polei
Bad Schandau, GERMANY
Martin Welzel
Dresden, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/7
H10P74/238
G03F7/42
Prosecution
- Examiner
- KIELIN, ERIK J
- Art Unit
- 2813
- Customer No.
- 24131
- Docket No.
- P2001,0568
- Confirmation No.
- 6014
Foreign Priority
01 119 150.9
·
2001-08-08
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20030029838A1
- Pub. Date
- 2003-02-13
Patent Term Adjustment
-3days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-02-02
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Quick Facts
- App. No.
- 10/215,226
- Filed
- 2002-08-08
- Granted
- 2004-03-23
- Pub. No.
- US20030029838A1
- Examiner
- KIELIN, ERIK J
- Art Unit
- 2813
- PTA
- -3 days
External Links