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App. No. 10/219,168 · Confirmation No. 4947

USE OF A DUAL-TONE RESIST TO FORM PHOTOMASKS INCLUDING ALIGNMENT MARK PROTECTION, INTERMEDIATE SEMICONDUCTOR DEVICE STRUCTURES AND BULK SEMICONDUCTOR DEVICE SUBSTRATES

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2006-10-17 COCOUT Certificate of Correction - Post Issue Communication 1 View
2006-07-31 COCIN Request for Certificate of Correction 19 View
2004-09-09 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-09-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-07-22 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-22 A.NA Amendment after Notice of Allowance (Rule 312) 2 View
2004-07-22 SPEC Specification 2 View
2004-07-22 CLM Claims 5 View
2004-07-22 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-07-22 LET. Miscellaneous Incoming Letter 4 View
2004-07-22 DRW Drawings-only black and white line drawings 1 View
2004-06-03 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-06-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-21 CFILE Request for Corrected Filing Receipt 4 View
2004-05-21 OATH Oath or Declaration filed 3 View
2004-04-28 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-28 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-28 FWCLM Index of Claims 1 View
2004-04-28 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-15 SRNT Examiner's search strategy and results 1 View
2004-02-26 WFEE Fee Worksheet (SB06) 1 View
2004-02-26 FWCLM Index of Claims 1 View
2003-10-06 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-10-06 CLM Claims 4 View
2003-10-06 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2003-10-06 OATH Oath or Declaration filed 3 View
2003-07-08 CTNF Non-Final Rejection 7 View
2003-07-08 892 List of references cited by examiner 1 View
2003-07-08 1449 List of References cited by applicant and considered by examiner 2 View
2003-06-25 SRNT Examiner's search strategy and results 5 View
2003-04-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-04-21 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-04-21 LET. Miscellaneous Incoming Letter 1 View
2003-04-21 DRW Drawings-only black and white line drawings 3 View
2003-03-17 CTRS Requirement for Restriction/Election 4 View
2002-09-18 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-08-15 TRNA Transmittal of New Application 2 View
2002-08-15 SPEC Specification 15 View
2002-08-15 CLM Claims 7 View
2002-08-15 ABST Abstract 1 View
2002-08-15 DRW Drawings-only black and white line drawings 5 View
2002-08-15 OATH Oath or Declaration filed 4 View
2002-08-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-08-15 FWCLM Index of Claims 1 View
2002-08-15 SRFW Search information including classification, databases and other search related notes 1 View
2002-08-15 TRNA Transmittal of New Application 2 View
2002-08-15 DRW Drawings-only black and white line drawings 5 View
2002-08-15 SPEC Specification 15 View
2002-08-15 CLM Claims 7 View
2002-08-15 ABST Abstract 1 View
2002-08-15 OATH Oath or Declaration filed 4 View
2002-08-15 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
2002-08-15 WFEE Fee Worksheet (SB06) 1 View
2002-08-15 WFEE Fee Worksheet (SB06) 1 View
2002-08-15 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
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Quick Facts
App. No.
10/219,168
Filed
2002-08-15
Granted
2004-11-09
Pub. No.
US20040032031A1
Art Unit
1647
PTA
-111 days