Granted Patent
Utility
US 6,593,242
· Confirmation No. 6421
PROCESS FOR PLANARIZATION AND RECESS ETCHING OF INTEGRATED CIRCUITS
Inventor:
Thomas Morgenstern
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-08-16 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-08-16 | SPEC |
Specification | 15 | View | |
| 2002-08-16 | CLM |
Claims | 3 | View | |
| 2002-08-16 | ABST |
Abstract | 1 | View | |
| 2002-08-16 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-08-16 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Thomas Morgenstern
Dresden, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/707
H10P50/268
H10D1/47
H10W10/041
H10P95/04
H10W10/40
Prosecution
- Examiner
- LEBENTRITT, MICHAEL
- Art Unit
- 2824
- Docket No.
- 2000P1279
- Confirmation No.
- 6421
Foreign Priority
00103154.1
·
2000-02-16
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20030022510A1
- Pub. Date
- 2003-01-30
Patent Term Adjustment
-8days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-03
from
MORGENSTERN, THOMAS
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-03-31
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Quick Facts
- Patent No.
- US 6,593,242
- App. No.
- 10/223,038
- Filed
- 2002-08-16
- Granted
- 2003-07-15
- Pub. No.
- US20030022510A1
- Examiner
- LEBENTRITT, MICHAEL
- Art Unit
- 2824
- PTA
- -8 days
External Links