IP Library Granted Patent US 6,710,407
Granted Patent Utility
US 6,710,407 · Confirmation No. 9884

SEMICONDUCTOR DEVICE HAVING SMOOTH REFRACTORY METAL SILICIDE LAYERS AND PROCESS FOR FABRICATION THEREOF

Inventor: Ichiro Yamamoto
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Code Description Pages PDF
2005-01-28 WFEE Fee Worksheet (SB06) 1 View
2004-01-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-15 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-15 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-10-15 1449 List of References cited by applicant and considered by examiner 1 View
2003-10-15 892 List of references cited by examiner 1 View
2003-10-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-15 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-15 SRNT Examiner's search strategy and results 1 View
2003-09-23 FWCLM Index of Claims 1 View
2003-09-23 WFEE Fee Worksheet (SB06) 1 View
2003-07-29 ELC. Response to Election / Restriction Filed 1 View
2003-07-29 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-07-29 WFEE Fee Worksheet (SB06) 1 View
2003-06-30 CTRS Requirement for Restriction/Election 4 View
2002-08-28 TRNA Transmittal of New Application 2 View
2002-08-28 ADS Application Data Sheet 3 View
2002-08-28 SPEC Specification 29 View
2002-08-28 CLM Claims 6 View
2002-08-28 ABST Abstract 1 View
2002-08-28 DRW Drawings-only black and white line drawings 10 View
2002-08-28 OATH Oath or Declaration filed 2 View
2002-08-28 WFEE Fee Worksheet (SB06) 1 View
2002-08-28 SRFW Search information including classification, databases and other search related notes 1 View
2002-08-28 FWCLM Index of Claims 1 View
2002-08-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-08-28 WFEE Fee Worksheet (SB06) 1 View
2002-08-28 SPEC Specification 29 View
2002-08-28 CLM Claims 6 View
2002-08-28 ABST Abstract 1 View
2002-08-28 OATH Oath or Declaration filed 2 View
2002-08-28 DRW Drawings-only black and white line drawings 10 View
2002-08-28 FRPR Certified Copy of Foreign Priority Application 33 View
2002-08-28 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-08-28 FRPR Certified Copy of Foreign Priority Application 33 View
2002-08-28 TRNA Transmittal of New Application 2 View
2002-08-28 ADS Application Data Sheet 3 View
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Quick Facts
Patent No.
US 6,710,407
App. No.
10/229,144
Filed
2002-08-28
Granted
2004-03-23
Pub. No.
US20030049919A1
Art Unit
2812
PTA
0 days