IP Library › Granted Patent US 6,774,660
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US 6,774,660 · Confirmation No. 8598

EVALUATING PATTERN FOR MEASURING AN EROSION OF A SEMICONDUCTOR WAFER POLISHED BY A CHEMICAL MECHANICAL POLISHING

Inventor: Tadashi Narita
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 Code Description Pages PDF
2004-05-05 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-11-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-11-17 REM Applicant Arguments/Remarks Made in an Amendment 17 View
2003-11-17 SPEC Specification 14 View
2003-11-17 ABST Abstract 1 View
2003-11-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-11-17 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-09-16 CTEQ Ex Parte Quayle Action 4 View
2003-09-06 SRNT Examiner's search strategy and results 7 View
2003-07-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-07-23 SPEC Specification 1 View
2003-07-23 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-07-23 DIST Terminal Disclaimer Filed 1 View
2003-04-23 CTNF Non-Final Rejection 5 View
2003-04-23 892 List of references cited by examiner 1 View
2003-04-23 1449 List of References cited by applicant and considered by examiner 1 View
2002-09-26 TRNA Transmittal of New Application 4 View
2002-09-26 A.PE Preliminary Amendment 11 View
2002-09-26 SPEC Specification 13 View
2002-09-26 CLM Claims 2 View
2002-09-26 ABST Abstract 1 View
2002-09-26 DRW Drawings-only black and white line drawings 4 View
2002-09-26 OATH Oath or Declaration filed 3 View
2002-09-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-09-26 SRFW Search information including classification, databases and other search related notes 1 View
2002-09-26 FWCLM Index of Claims 2 View
2002-09-26 TRNA Transmittal of New Application 4 View
2002-09-26 DRW Drawings-only black and white line drawings 4 View
2002-09-26 SPEC Specification 14 View
2002-09-26 CLM Claims 2 View
2002-09-26 ABST Abstract 1 View
2002-09-26 OATH Oath or Declaration filed 3 View
2002-09-26 WFEE Fee Worksheet (SB06) 1 View
2002-09-26 WFEE Fee Worksheet (SB06) 1 View
2002-09-26 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-09-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-09-26 SPEC Specification 1 View
2002-09-26 CLM Claims 7 View
2002-09-26 REM Applicant Arguments/Remarks Made in an Amendment 3 View
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Quick Facts
Patent No.
US 6,774,660
App. No.
10/254,645
Filed
2002-09-26
Granted
2004-08-10
Pub. No.
US20030020510A1
Art Unit
2133
PTA
0 days