IP Library › Granted Patent US 6,704,340
Granted Patent Utility
US 6,704,340 · Confirmation No. 2931

LITHOGRAPHY LASER SYSTEM WITH IN-PLACE ALIGNMENT TOOL

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2004-01-20 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2003-12-10 IFEE Issue Fee Payment (PTO-85B) 4 View
2003-12-08 PA.. Power of Attorney 2 View
2003-12-08 C.AD Change of Address 1 View
2003-12-08 LET. Miscellaneous Incoming Letter 2 View
2003-12-08 DRW Drawings-only black and white line drawings 29 View
2003-01-21 TRNA Transmittal of New Application 5 View
2003-01-21 A.PE Preliminary Amendment 2 View
2003-01-21 DRW Drawings-only black and white line drawings 29 View
2003-01-21 OATH Oath or Declaration filed 4 View
2002-09-25 TRNA Transmittal of New Application 4 View
2002-09-25 ADS Application Data Sheet 3 View
2002-09-25 SPEC Specification 33 View
2002-09-25 CLM Claims 3 View
2002-09-25 ABST Abstract 1 View
2002-09-25 DRW Drawings-only black and white line drawings 24 View
2002-09-25 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,704,340
App. No.
10/255,806
Filed
2002-09-25
Granted
2004-03-09
Pub. No.
US20030091087A1
Art Unit
2828
PTA
-93 days