IP Library › Granted Patent US 6,693,939

Granted Patent Utility

US 6,693,939 · Confirmation No. 8174

LASER LITHOGRAPHY LIGHT SOURCE WITH BEAM DELIVERY

Inventors: Brian Klene, Palash P. Das, Steve Grove, Alexander Ershov, Scot Smith, Xiaojiang Pan, Richard L. Sandstrom

Patented Case View Patent ↗ View Publication ↗

⬇ PDF		Code	Description	Pages	PDF
	2003-12-18	`CTMS`	Miscellaneous Action with shortened statutory period (SSP)	2	View
	2003-11-17	`IFEE`	Issue Fee Payment (PTO-85B)	4	View
	2003-11-17	`PA..`	Power of Attorney	2	View
	2003-11-17	`C.AD`	Change of Address	1	View
	2002-08-12	`TRNA`	Transmittal of New Application	5	View
	2002-08-12	`DRW`	Drawings-only black and white line drawings	14	View
	2002-08-12	`OATH`	Oath or Declaration filed	5	View
	2002-05-07	`TRNA`	Transmittal of New Application	4	View
	2002-05-07	`ADS`	Application Data Sheet	4	View
	2002-05-07	`SPEC`	Specification	22	View
	2002-05-07	`CLM`	Claims	5	View
	2002-05-07	`ABST`	Abstract	1	View
	2002-05-07	`DRW`	Drawings-only black and white line drawings	8	View
	2002-05-07	`OATH`	Oath or Declaration filed	5	View
	2002-05-07	`LET.`	Miscellaneous Incoming Letter	1	View

Inventors

Brian Klene La Jolla, CA

Palash P. Das Vista, CA

Steve Grove Poway, CA

Alexander Ershov San Diego, CA

Scot Smith San Diego, CA

Xiaojiang Pan San Diego, CA

Richard L. Sandstrom Encinitas, CA

Attorneys & Agents of Record

WILLIAM CRAY Reg. 27627 Attorney · SHARTSIS FRIESE LLP

ALBERT CEFALO Reg. 27315 Attorney · SEMEQUIP, INC.

MARK MALIN Reg. 41176 Attorney · DEWEY BALLANTINE LLP

CYRUS BHARUCHA Reg. 42324 Attorney

Classification

USPC 372/58

G03F7/70933 H01S3/03 G03F7/70025 G03F7/70041 G03F7/70575 H01S3/0057 H01S3/0071 H01S3/02 H01S3/036 H01S3/038 H01S3/0385 H01S3/0404 H01S3/041 H01S3/08004 H01S3/08009 H01S3/0943 H01S3/097 H01S3/09705 H01S3/0971 H01S3/0975 H01S3/104 H01S3/105 H01S3/1305 H01S3/134 H01S3/139 H01S3/22 H01S3/2207 H01S3/223 H01S3/225 H01S3/2251 H01S3/2256 H01S3/2258 H01S3/2333 H01S3/2366

Prosecution

Examiner: ZAHN, JEFFREY N
Art Unit: 2828
Customer No.: 21773
Docket No.: 2002-0039-1
Confirmation No.: 8174

Publication

Pub. No.: US20020191654A1
Pub. Date: 2002-12-19

Patent Term Adjustment

0days

Parent is a Continuation in-part of

App. 10/036,676 · US 6,882,674

Filed 2001-12-21 · Patented Case

Parent is a Continuation in-part of

App. 10/036,727 · US 6,865,210

Filed 2001-12-21 · Patented Case

Parent is a Continuation in-part of

App. 10/006,913 · US 6,535,531

Filed 2001-11-29 · Patented Case

Parent is a Continuation in-part of

App. 10/000,991 · US 6,795,474

Filed 2001-11-14 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent is a Continuation in-part of

App. 09/943,343 · US 6,567,450

Filed 2001-08-29 · Patented Case

Parent is a Continuation in-part of

App. 09/854,097 · US 6,757,316

Filed 2001-05-11 · Patented Case

Parent is a Continuation in-part of

App. 09/848,043 · US 6,549,551

Filed 2001-05-03 · Patented Case

Parent is a Continuation in-part of

App. 09/837,150 · US 6,504,860

Filed 2001-04-18 · Patented Case

Parent is a Continuation in-part of

App. 09/829,475 · US 6,765,945

Filed 2001-04-09 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent is a Continuation in-part of

App. 09/771,789 · US 6,539,042

Filed 2001-01-29 · Patented Case

Child is a Continuation in-part of

App. 10/255,806 · US 6,704,340

Filed 2002-09-25 · Patented Case

Child is a Continuation in-part of

App. 10/722,992

Filed 2003-11-26 · Abandoned -- Incomplete Application (Pre-examination)

Child PCT is a Continuation of

PCT/US2002/026400

Filed 2002-08-19 · RO PROCESSING COMPLETED-PLACED IN STORAGE

Child is a Continuation in-part of

App. 10/233,253 · US 6,704,339

Filed 2002-08-30 · Patented Case

Child is a Continuation in-part of

App. 10/425,361 · US 7,230,964

Filed 2003-04-29 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation in-part of

App. 11/715,082

Filed 2007-03-06 · Abandoned -- Failure to Respond to an Office Action

Child PCT is a Continuation of

PCT/US2003/014387

Filed 2003-05-05 · PCT - IPER (International Preliminary Examination Report) 409-416 Mailed

Child is a Continuation in-part of

App. 11/181,258 · US 7,079,564

Filed 2005-07-14 · Patented Case

Child is a Continuation in-part of

App. 11/529,690

Filed 2006-09-27 · Abandoned -- Failure to Pay Issue Fee

Child is a Continuation in-part of

App. 10/384,967 · US 6,904,073

Filed 2003-03-08 · Patented Case

Child is a Continuation in-part of

App. 10/872,620

Filed 2004-06-21 · Abandoned -- Failure to Respond to an Office Action

Child is a Continuation in-part of

App. 10/356,168 · US 6,963,595

Filed 2003-01-31 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation in-part of

App. 13/571,129 · US 8,737,438

Filed 2012-08-09 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation in-part of

App. 10/243,102 · US 6,798,812

Filed 2002-09-13 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation in-part of

App. 11/376,364 · US 7,596,164

Filed 2006-03-15 · Patented Case

Child is a Continuation in-part of

App. 10/739,961 · US 7,190,707

Filed 2003-12-17 · Patented Case

Child PCT is a Continuation of

PCT/US2002/026011

Filed 2002-08-16 · RO PROCESSING COMPLETED-PLACED IN STORAGE

Child is a Continuation in-part of

App. 10/187,336 · US 6,914,919

Filed 2002-06-28 · Patented Case

Child is a Continuation in-part of

App. 10/210,761 · US 6,690,704

Filed 2002-07-31 · Patented Case

Child is a Continuation in-part of

App. 11/352,522 · US RE42,588

Filed 2006-02-10 · Patented Case

Child PCT is a Continuation of

PCT/US2003/013939

Filed 2003-05-05 · PCT - IPER (International Preliminary Examination Report) 409-416 Mailed

Child is a Continuation of

App. 10/712,688 · US 7,016,388

Filed 2003-11-12 · Patented Case

Child is a Continuation in-part of

App. 10/675,334

Filed 2003-09-29 · Expressly Abandoned -- During Examination

Child is a Continuation in-part of

App. 10/712,545 · US 6,928,093

Filed 2003-11-13 · Patented Case

Child is a Continuation in-part of

App. 11/138,001

Filed 2005-05-26 · Abandoned -- Failure to Respond to an Office Action

Child is a Continuation in-part of

App. 12/386,771 · US 8,265,109

Filed 2009-04-21 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

CYMER, LLC

from CYMER, INC.

MERGER Recorded 2014-03-07

032383/0313 →

CYMER, INC.

from SMITH, SCOT T., ERSHOV, ALEXANDER I, GROVE, STEVEN L., PAN, XIAOJIANG, DAS, PALASH P., KLENE, BRIAN CHARLES, SANDSTROM, RICHARD L

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2002-08-14

013187/0540 →

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Quick Facts

Patent No.: US 6,693,939
App. No.: 10/141,216
Filed: 2002-05-07
Granted: 2004-02-17
Pub. No.: US20020191654A1
Examiner: ZAHN, JEFFREY N
Art Unit: 2828
PTA: 0 days

External Links

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