Granted Patent
Utility
US 6,704,339
· Confirmation No. 8181
LITHOGRAPHY LASER WITH BEAM DELIVERY AND BEAM POINTING CONTROL
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-07 | IFEE |
Issue Fee Payment (PTO-85B) | 4 | View | |
| 2003-10-14 | C.AD |
Change of Address | 2 | View | |
| 2003-10-14 | NFDR |
Notice of Formal Drawings Required | 1 | View | |
| 2003-10-14 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-10-14 | DRW |
Drawings-only black and white line drawings | 21 | View | |
| 2003-04-28 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-04-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 17 | View | |
| 2003-04-28 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2003-04-28 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-04-28 | PA.. |
Power of Attorney | 1 | View | |
| 2002-08-30 | TRNA |
Transmittal of New Application | 4 | View | |
| 2002-08-30 | SPEC |
Specification | 29 | View | |
| 2002-08-30 | CLM |
Claims | 6 | View | |
| 2002-08-30 | ABST |
Abstract | 1 | View | |
| 2002-08-30 | DRW |
Drawings-only black and white line drawings | 19 | View | |
| 2002-08-30 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Leonard Lublin
Concord, MA
David J. Warkentin
Boston, MA
Palash P. Das
Vista, CA
Brian C. Klene
La Jolla, CA
R. Kyle Webb
Escondido, CA
Herve A. Besaucele
San Diego, CA
Ronald L. Spangler
Arlington, MA
Richard L. Sandstrom
Encinitas, CA
Alexander I. Ershov
San Diego, CA
Shahryar Rokni
Carlsbad, CA
Attorneys & Agents of Record
Classification
USPC
372/57
H01S3/005
G03F7/70025
G03F7/70041
G03F7/7055
G03F7/70575
G03F7/70933
H01S3/0057
H01S3/0071
H01S3/02
H01S3/03
H01S3/036
H01S3/038
H01S3/0385
H01S3/0404
H01S3/041
H01S3/08004
H01S3/08009
H01S3/0943
H01S3/097
H01S3/09705
H01S3/0971
H01S3/0975
H01S3/104
H01S3/105
H01S3/1305
H01S3/134
H01S3/139
H01S3/22
H01S3/2207
H01S3/223
H01S3/225
H01S3/2251
H01S3/2256
H01S3/2258
H01S3/2333
H01S3/2366
Prosecution
- Examiner
- ZAHN, JEFFREY N
- Art Unit
- 2828
- Customer No.
- 21773
- Docket No.
- 2002-0076-1
- Confirmation No.
- 8181
Publication
- Pub. No.
- US20030043876A1
- Pub. Date
- 2003-03-06
Patent Term Adjustment
-120days
Parent
is a Continuation in-part of
→
App. 10/141,216
· US 6,693,939
Filed 2002-05-07
· Patented Case
Parent
is a Continuation in-part of
→
App. 10/036,676
· US 6,882,674
Filed 2001-12-21
· Patented Case
Parent
is a Continuation in-part of
→
App. 10/036,727
· US 6,865,210
Filed 2001-12-21
· Patented Case
Parent
is a Continuation in-part of
→
App. 10/006,913
· US 6,535,531
Filed 2001-11-29
· Patented Case
Parent
is a Continuation in-part of
→
App. 10/000,991
· US 6,795,474
Filed 2001-11-14
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Continuation in-part of
→
App. 09/943,343
· US 6,567,450
Filed 2001-08-29
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/854,097
· US 6,757,316
Filed 2001-05-11
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/848,043
· US 6,549,551
Filed 2001-05-03
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/837,150
· US 6,504,860
Filed 2001-04-18
· Patented Case
Parent
is a Continuation in-part of
→
App. 09/829,475
· US 6,765,945
Filed 2001-04-09
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Continuation in-part of
→
App. 09/771,789
· US 6,539,042
Filed 2001-01-29
· Patented Case
Child
is a Continuation in-part of
→
App. 10/884,547
· US 7,061,959
Filed 2004-07-01
· Patented Case
Child
is a Continuation in-part of
→
App. 10/384,967
· US 6,904,073
Filed 2003-03-08
· Patented Case
Child
PCT
is a Continuation of
→
PCT/US2003/014387
Filed 2003-05-05
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Continuation in-part of
→
App. 10/243,102
· US 6,798,812
Filed 2002-09-13
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 10/872,620
Filed 2004-06-21
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation in-part of
→
App. 11/201,877
· US 7,884,303
Filed 2005-08-11
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 11/529,690
Filed 2006-09-27
· Abandoned -- Failure to Pay Issue Fee
Child
is a Continuation in-part of
→
App. 10/781,251
· US 7,167,499
Filed 2004-02-18
· Patented Case
Child
is a Continuation in-part of
→
App. 10/884,101
· US 7,009,140
Filed 2004-07-01
· Patented Case
Child
PCT
is a Continuation of
→
PCT/US2003/012819
Filed 2003-04-23
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Continuation in-part of
→
App. 10/255,806
· US 6,704,340
Filed 2002-09-25
· Patented Case
Child
is a Continuation in-part of
→
App. 10/425,361
· US 7,230,964
Filed 2003-04-29
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 12/979,292
· US 8,362,391
Filed 2010-12-27
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation in-part of
→
App. 10/722,992
Filed 2003-11-26
· Abandoned -- Incomplete Application (Pre-examination)
from
SPANGLER, RONALD L.,
WARKENTIN, DAVID J.,
WEBB, R. KYLE,
KLENE, BRIAN C.,
BESAUCELE, HERVE A.,
DAS, PALASH P.,
ERSHOV, ALEXANDER I.,
LUBLIN, LEONARD,
ROKNI, SHAHRYAR,
SANDSTROM, RICHARD L.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-10-29
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Quick Facts
- Patent No.
- US 6,704,339
- App. No.
- 10/233,253
- Filed
- 2002-08-30
- Granted
- 2004-03-09
- Pub. No.
- US20030043876A1
- Examiner
- ZAHN, JEFFREY N
- Art Unit
- 2828
- PTA
- -120 days
External Links